For the fabrication of thermopile arrays, we have maintained a close partnership with the leading manufacturer Heimann Sensor for over 10 years. Thermopile arrays are used especially in times of Corona for the detection of radiated body temperature. This is used, for example, at airports for the early detection of infectious air travelers.
In cooperation, the thermopile arrays are being iteratively developed and manufactured at IPMS. The three partners, consisting of Heimann Sensor as the product developer, XFAB as the CMOS supplier and the IPMS as the technology partner for the back-end area, are currently working on a project that will lead to a further improvement in pixel size and, as a direct consequence, to a higher pixel density while maintaining the same array size, thus optimizing the resolution. The IPMS is primarily responsible for the hard mask, the isolation structures and the absorber structures and transfers these components for final processing to Heimann Sensor for the realization of pixel arrays with resolutions up to 120x84. The fabrication of existing component generations takes place continuously.