Fraunhofer Institute for Photonic Microsystems
Join our talk at the SPIE Photonics West Digital Forum to learn more about the Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators. MEMS-on-CMOS technology is a combination of commercially available CMOS processes from foundries with subsequent MEMS processing in a second MEMS facility. Fraunhofer IPMS employs surface micromachining on 200mm wafers for a variety of MEMS devices e.g. spatial light modulators (SLM).
You will also find us in the Exhibitor Marketplace, where you can take the opportunity to talk to our experts in the fields of Spatial Light Modulators (SLM) and Active Microoptical Components and Systems (AMS).
Contributions of Fraunhofer IPMS
Challenges of monolithic MEMS-on-CMOS integration for spatial light modulators
Dr. Christoph Hohle, Group Manager Light Modulator Technology
SPIE OPTO Symposium
MOEMS and Miniaturized Systems XX Conference
Session 7 - Imaging
Paper 11697-29
Talk and paper will be available at SPIE Digital Forum from March 6-11.