Fraunhofer Institute for Photonic Microsystems
From customer-specific development to pilot production
Scanning mirrors, either resonantly or quasi-statically operated, are the technology of choice when it comes to selectively deflecting light with very compact systems. At Fraunhofer IPMS you will find technological competence for component and system development and application know-how from more than 10 years of development work in equal measure.
In recent years, Fraunhofer IPMS has developed more than 50 different resonant MEMS scanners, which are used as one- or two-dimensional deflecting elements or also for optical path length modulation.
Our offer at a glance
- Tilting and translational mirrors
- 1D and 2D deflection (resonant, quasi-static)
- Large optical scanning range: 136°
- Frequencies: 0.1 Hz - 100kHz
- Mirror diameter: 0.5 - 5 mm (9.0 mm)
- Planarity: better than λ/10
- Highly reflective coatings possible
- Integrated piezo-resistive position sensors
You can expect excellent long-term behavior, high temperature, vibration and shock resistance from our mirrors.
We're happy to develop customer-specific scanning solutions for your application and provide qualified MEMS scanner dies and scan engines in larger numbers via pilot fabrication.
Our extensive packaging and assembly know-how and qualified pilot production make us a strong partner for your project.
