200 mm MEMS Cleanroom

At Fraunhofer IPMS, our MEMS specialists are poised to transform your vision into a tangible and manufacturable reality. Here is a step-by-step guide on how we handle your MEMS project to ensure optimal outcomes.

Confidentiality is a key priority for us. With our ISO9001:2015 certification you can be certain that we have implemented professional project management.

In the initial phase, we work closely with you to develop a comprehensive process concept that captures your specific needs and translates them into a viable manufacturing process at Fraunhofer IPMS.

Our team of experts collaborates with you to understand every detail of your requirements and objectives. This thorough understanding enables us to generate a process design that aligns perfectly with your vision.

Should your project not encompass a complete process, we meticulously define the interfaces with material suppliers and/or service companies, ensuring seamless integration and collaboration. This holistic approach guarantees that all aspects of the process are well-coordinated from the very beginning.

We will be happy to sign an NDA if you wish to exchange sensitive information. 

At the end of this phase, we have clarified the technical details and can submit a project proposal and a formal offer to you.

Next, we move into the proof-of-concept phase. Here, we install the process modules in the cleanroom environment of Fraunhofer IPMS and conduct trial runs to validate their suitability.

This phase involves setting up the necessary equipment and ensuring that each process module functions as intended in a controlled environment. Each process module undergoes rigorous testing to ensure quality and performance. Our specialists monitor every aspect of the trial runs, making adjustments as needed to optimize the process.

At the end of this phase, the overall process undergoes a proof-of-concept evaluation. This comprehensive evaluation ensures that all components work harmoniously together, forming a cohesive and effective manufacturing process.

Upon your request, we enter the third phase, where we stabilize and optimize the process.

This phase is crucial for fine-tuning the manufacturing process to achieve optimal performance and consistency. Through detailed statistical analysis, we identify areas for improvement and implement necessary changes. These optimizations are meticulously tested to ensure they enhance the process without introducing new variables. This phase culminates in the qualification of the manufacturing process, validated in collaboration with you.

By the end of this phase, you can be confident that the process is robust, reliable, and ready for a pilot fabrication.

Finally, Fraunhofer IPMS offers pilot fabrication of the process modules and processes within our state-of-the-art cleanroom facilities. This phase allows for a professional and controlled environment to ensure the process is ready for pilot fabrication.

In the pilot production we manufacture your devices according to the specifications in an annual order volume range from 10 to 5000 wafers. During pilot fabrication, we continuously optimize the fabrication process. If you need higher volumes we are ready to transfer your process to a larger volume fab. We are happy to consult with your foundry of choice and support the process transfer.

By the end of this phase, you have a running pilot fabrication of your device - either in our clean room or in an external foundry.