Clean Technologies

Our projects:

 

Research project

Environmentally compatible slurries

 

Research Project

Environmentally friendly cleaning solvents for lithography

 

Research project

Chemical Mechanical Polishing (CMP) without ceria abrasives

 

Research project

Reduction of PFAS in microelectronics production

 

Research project

Resource- and energy-saving ISFET-based sensor technology

 

Research project

Substitution of N-Methyl-2-pyrrolidon (NMP)

 

Research project

Environmentally friendly cleaning technologies