Fraunhofer Institute for Photonic Microsystems
Fraunhofer Institute for Photonic Microsystems

FT-IR Scan-Engines

We develop scan engines, MEMS mirrors and opto-designs for FT-IR spectrometers (Fourier Transform Infrared Spectrometers). These are fully customizable to your needs and wishes. The supplied parts are directly usable through industry standard interfaces.

Optical metrology systems like Fourier Transform Spectrometers or  confocal microscopes require fast modulation of the optical path length to shorten measurement times. Conventional solutions with complex driving mechanics for the deflectable mirrors show high sensitivity against vibrations and shock. As a result they are suitable for laboratory operation only.

The Fraunhofer IPMS translational mirrors for optical path length modulation overcome this disadvantage. In addition to high vibration and shock insensitivity, the advantage of high frequency operation and potential low fabrication cost for medium and high volumes enables the development of robust, fast and highly miniaturized metrology systems for industrial applications.

What we offer

MEMS mirror with a mechanical deflection of 400 μm.
© Fraunhofer IPMS
MEMS mirror with a mechanical deflection of 400 μm.
  • FT-IR Demo System (Customer Evaluation Kits)
  • Interference Scan Engines FT-IR
  • Scan engines for FT-IR
  • Provision of MEMS mirror modules up to 25,000 pieces or as bare die in larger quantities
  • Optics design, electronics development, construction
  • Support with optical design, optomechanical design, process transfer through to complete development services (customizing)

Just get in touch with us!

Advantages of our technology

Advantage compared to grating spectrometers:

  • Better SNR, higher light throughput
  • Higher wavelength stability
  • Use in MIR possible
  • No limited wavelength range within one diffraction order

Advantage over other FT-IR spectrometers

  • Higher optical throughput (larger aperture)
  • larger amplitude
  • Better SNR (signal-to-noise ratio) and higher spectral resolution
Set-up of Fourier transform spectrometer.
Set-up of Fourier transform spectrometer.

Possible specifications

NIR (near-infrared):

  • Wavelength range: 640 - 2500 nm
  • Scanning speed 250...300 Hz
  • Spectral resolution Δv = 8 cm-1 (800 nm - 2.5 µm)
  • Form factor VWLP (Vacuum Wafer Level MEMS Package) 12.6 x 12.6 x3 mm²

MIR (mid-infrared)

  • spectral range: 2 µm - 14 µm (16 µm)
  • 5 mm aperture 
  • ±500 µm amplitude (in vacuum) 
  • scan frequency 300...500 Hz
  • Spectral resolution e.g. Δv = 12 cm-1 (4.5 nm @ 2 µm) up to Δv = 4...8 cm-1 

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