MEMS scanners are the technology of choice when it comes to utilizing the principle of light deflection for object identification and characterization or image capture and projection while implementing compact systems with minimized dimensions. For many of these applications however, it is necessary to have actuators that can resonate on two axes at different frequencies. The Fraunhofer Institute for Photonic Microsystems IPMS has been developing this type of two-dimensional MEMS scanning mirrors for its clients for many years, and thus provides internationally leading microscanner technology regarding frequency range, deflection, optical characteristics and reliability.

Fraunhofer IPMS has now developed and successfully tested 2D microscanning mirrors on the VarioS modular design principle based upon a platform technology with defined interfaces, standard components and base substrates. A huge success, finds Denis Jung, Project Manager at Fraunhofer IPMS, and explains: »The VarioS wafers are pre-processed to about two thirds of the entire manufacturing process and can then be stored until they are commissioned. That makes it possible to deliver devices to customer specifications as quickly as within nine to eleven weeks, and at moderate prices. This, in turn, means that the technological barriers preventing especially small and medium-sized businesses from entering the market due to their limited research budgets can be significantly reduced«.

Inquiries about 2D MEMS scanning mirrors are simple to make on the internet at www.micro-mirrors.com. The website offers the user a configuration and ordering tool to specify the dimensions of the mirror plate, scan angle and scan frequency. If required even the dynamic flatness of the mirror plate can be specified. The software checks and lists the configurations that are technically possible and from which the user can select the chip type and batch size for a quote if desired. 2D microscanner demonstrators with mirror diameters between 0.5 and 2 mm are available starting from € 3325 and are normally ready for the customer within ten weeks upon placement of an order.

About Fraunhofer IPMS

The Fraunhofer Institute for Photonic Microsystems IPMS and its 220 employees turn over an annual research volume of nearly 26 million euros. Fraunhofer IPMS generates more than two thirds of this production capacity out of commissions from industry and publicly financed projects in applied research. The focus of our development and production services lies in the practical industrial application of unique technological know-how in the fields of (optical) micro-electromechanical systems [MEMS, MOEMS]. Fraunhofer IMPS uses scientific know-how, application experience and customer contacts as well as modern equipment and clean room infrastructure. Fraunhofer IPMS covers a broad spectrum of industrial applications. Our services range from initial conception to product development, right down to serial pilot production – from a single component to a complete system solution.