Deflecting light over an axis is the key to a great variety of applications, such as barcode reading, laser projection of images, or three-dimensional object measurement. Resonant micro-scanning mirrors, or micro-scanners, such as those being developed at the Fraunhofer Institute for Photonic Microsystems IPMS for many years, are the technology of choice when it comes to building systems that are compact, energy-efficient, robust, and affordable. These resonant micromirrors made of silicon, are 0.5 to 3 mm large in diameter and predestined for cost-efficient mass production.

The number of micro-scanner based products is nonetheless still within a limited range. »The development of complex MEMS devices like our scanning mirrors is not only time consuming and coupled with high costs,« explains Denis Jung, Project Manager at Fraunhofer IPMS. »It is also the integration of the micro-scanners, position detection and drive electronics in the system environment that can pose a hurdle for potential users considering microscanners for new applications and products.«

With sales of the LCD custom-configurable Evaluation Kit on the internet, Fraunhofer IPMS now supports its customers in keeping up with the technological demands on product cycles that are perpetually shorter and shorter. The encapsulated Light Deflection Cube Evaluation Kit is based upon a standardized, configurable VarioS® MEMS mirror and, along with the MEMS mirror, it includes a position sensor, complete drive electronics, as well as a software interface to specify the operating parameters. The circular mirror plate of the micro scanning mirror build into the LDC module can be chosen between 0.5 mm and 3 mm in diameter.

Inquiries about an LDC are simple to make on the internet at www.micro-mirrors.com. The website offers the user a configuration and ordering tool to specify the dimensions of the mirror plate, scan angle and scan frequency. If required even the dynamic flatness of the mirror plate can be specified. The software checks and lists the configurations that are technically possible and from which the user can select the chip type and batch size for a quote if desired. LDCs are available starting from € 5100 / module and are normally ready for the customer within ten weeks upon placement of an order.

About Fraunhofer IPMS

The Fraunhofer Institute for Photonic Microsystems IPMS and its 220 employees turn over an annual research volume of nearly 26 million euros. Fraunhofer IPMS generates more than two thirds of this production capacity out of commissions from industry and publicly financed projects in applied research. The focus of our development and production services lies in the practical industrial application of unique technologicalknow-how in the fields of (optical) micro-electromechanical systems [MEMS, MOEMS]. Fraunhofer IMPS uses scientific know-how, application experience and customer contacts as well as modern equipment and clean room infrastructure. Fraunhofer IPMS covers a broad spectrum of industrial applications. Our services range from initial conception toproduct development, right down to serial pilot production – from a single component to a complete system solution.