Owing to their minimum dimensions, multi functionality and energy efficiency micro-electro-mechanical systems – MEMS have initiated major innovations and are supposed to play an important role for future applications. However, the development and fabrication of MEMS is regarded as both time-consuming and expensive because usually for each MEMS device, specific manufacturing and packaging processes are needed. Fraunhofer Institute for Photonic Microsystems IPMS in Dresden overcomes this dilemma which is known as the »MEMS Law« »One MEMS, one process« by implementing standards for the development and fabrication of MEMS. A first example in the field of MEMS scanner devices leading to reduced development time and costs is the microscanner construction set VarioS. At Semicon Europe visitors have the chance to learn more about Fraunhofer IPMS products and services.

The Fraunhofer IPMS Microscanner Construction Set VarioS allows, in astonishing simple way, to choose online at www.micro-mirrors.com from more then 150 readily fabricated designs in stock and to configure customer specific microscanners. Essential device characteristics such as microscanner type (1D, 2D), mirror diameter (≤ 3 mm), scan frequency (0.1 - 50 kHz), mechanical mirror deflection < ±30° as well as dynamic optical mirror planarity can be specified.

»The speciality of our offer is that we provide complete services for microelectro- mechanical systems and opto-micro-electro-mechanical systems including technology development, fabrication and systems integration«, says director Hubert Lakner and points out »VarioS impressively shows that we are also in the position to manufacture customer specific MEMS devices in a short time at low costs. Thus we are able to compete with commercial MEMS foundries not only in terms of quality but also with a view to lead time and price«.

With outstanding technology know-how, expertise in industrial manufacturing projects and the infrastructure needed including state-of-the-art equipment and 1500 m² class 10 clean room facilities Fraunhofer IPMS especially wants to attract potential customers with a special focus on small and medium companies, who don't provide own MEMS development resources. In order to learn more about these new opportunities for MEMS development and fabrication Fraunhofer IPMS invites all Semicon visitors to attend a presentation in the Semicon TechArena on October 11 at 3:45 p.m. and to join a guided company tour through the clean room and showroom of the institute for product demonstrations on the second day of the show, on October 12. Meeting point for the two hour lasting tour is the Fraunhofer IPMS' exhibition booth 1.071 in hall 1 at 4:30 p.m. The number of attendees is limited to 20 people. A shuttle transfer to the institute and the way back is organized. Application is requested.

Clean room for microsystems of the Fraunhofer Institute for Photonic Microsystems with access to the institute building.

Microscanner construction set VarioS - the online path to individually tailored microscanners.

About Fraunhofer IPMS

The Fraunhofer Institute for Photonic Microsystems IPMS and its 220 employees turn over an annual research volume of nearly 26 million euros. Fraunhofer IPMS generates more than two thirds of this production capacity out of commissions from industry and publicly financed projects in applied research. The focus of our development and production services lies in the practical industrial application of unique technological know-how in the fields of (optical) micro-electromechanical systems [MEMS, MOEMS] . Fraunhofer IMPS uses scientific know-how, application experience and customer contacts as well as modern equipment and clean room infrastructure. Fraunhofer IPMS covers a broad spectrum of industrial applications. Our services range from initial conception to product development, right down to serial pilot production – from a single component to a complete system solution.