Project: EMSIg - MEMS-based ion mobility spectrometer

In environmental analysis, medical technology, production and safety technology as well as in many other areas of life and work, the detection of volatile organic compounds (VOCs) at low concentrations is required. Measuring methods based on ion mobility (IMS) are suitable for the qualitative and quantitative determination of such substances and sub-stance mixtures in the ppm and ppb range. Such devices are already successfully established in many areas, for example as explosives and drug detection devices at airports.

For stationary applications where size is not a priority, the demand can be met. The increasing demand for small and portable gas analysis systems, which also require the provision of larger quantities, cannot be met by current devices and assemblies.

The miniaturization of such device solutions is therefore a fundamental prerequisite for a significant expansion of the fields of application of the measurement method. In addition, the production of the systems is linked to realization using technologies suitable for mass production in order to be able to address future-relevant and economically attractive markets. The aim of this project is to develop a novel MEMS-based ion mobility spectrometer (MEMS-IMS) based on a monolithically integrated ion filter including an ion detector for the detection of volatile organic substances, which allows mobile use, can be manufactured in large quantities and covers the diverse areas of application mentioned. The use of silicon-based microtechnologies represents a promising basis for the implementation of these objectives.

The aim is to develop a highly innovative product that is capable of continuously detecting and analyzing organic air constituents and quantifying them even in the lowest concentrations. At the same time, future devices should be mobile, cost-effective and energy-efficient in operation.

The EMSIg project enables a compact design of measuring devices based on ion mobility spectrometry. In addition to the reduction in volume and the associated weight and material savings, miniaturization is also accompanied by an optimization of energy requirements during operation, while at the same time reducing the energy and logistics costs for transport and mobile use.

The range of application of the devices, for example in environmental measurement technology, enables the detection of environmental toxins at very low concentrations, allowing early action to be taken and damage caused by environmental toxins to be avoided.