Project: Infrastructure 2021/2022

Funding: This project is financially supported by the Ministry of Science, Research and Culture (MWFK) of the State of Brandenburg.

Funding of Infrastructure for Research, Development and Innovation (InfraFEI).

Project duration: 26.08.2021-30.09.2022 (extension until 31.12.2022).

Funding Objective:

This project supports the institute branch "Integrated Silicon Systems" IPMS-ISS in Cottbus by further expanding the infrastructure of Fraunhofer IPMS.

In the long term, the Cottbus site is to be established as the region's development core for miniaturized sensory and actuator applications, and system elements for electronic control, data transmission and, in particular, decentralized decision-making are to be integrated there in addition to purely sensory components. Silicon-based micro- and nanosystems will serve as the basis and will be researched and developed. Some of the requested investments are needed for the related projects.

The funding will enable the procurement of the following equipment:

• Sample manipulation system (Ion Milling System) to produce cross-sections of the microchips prior to optical inspection.
• PicoScale vibrometer for mechanical characterization of the micro-electromechanical systems (MEMS)
• Critical point dryer for sample preparation prior to 2-photon-based 3D printing