MMA(q)opt - Micromirror arrays for the generation of micro-optical elements for (quantum) optical data transmission

© Laserinstitut Hochschule Mittweida
Fork grating

In light of advancing digitalization and the development of quantum technologies, the demand for high-precision micro-optical components is growing, especially for optical data transmission. However, existing production methods are increasingly reaching their limits. In order to meet these increasing requirements, a specially developed matrix of individually controllable micromirrors is being tested and optimized. This technology could make it possible to produce micro-optics in glasses and optical crystals with high flexibility, precision and speed.

The combination of adaptability and speed of the process would enable the individualized and simultaneously scalable mass production of micro-optical components - a decisive step towards industrial application. An immediate field of application for the structures produced in this way is an innovative data transmission module based on the modulation of the orbital angular momentum of optical signals. In the long term, this could considerably increase the capacity of optical transmission channels and thus significantly increase the data rate in optical networks. In addition, the technology could also be used to produce high-precision micro-optics for new quantum optical applications.

The project is being funded by the BMBF as part of the “Validation of the technological and social innovation potential of scientific research - VIP+” program over a period of three years.

Spatial light modulators

© Fraunhofer IPMS
Spatial light modulator with one megapixel.
© Fraunhofer IPMS
SEM image of 16 × 16 μm micromirrors.

The spatial light modulators developed at Fraunhofer IPMS consist of arrays of micromirrors on semiconductor chips, whereby the number of mirrors varies depending on the application, from a few hundred to several millions. In most cases this demands a highly integrated application specific electronic circuit (ASIC) as basis for the component architecture in order to enable an individual analog deflection of each micromirror. In addition, Fraunhofer IPMS develops electronics and software for mirror array control. The individual mirrors can be tilted or vertically deflected depending on the application, so that a surface pattern is created, for example to project defined structures. High resolution tilting mirror arrays with up to 2.2 million individual mirrors are used by our customers as highly dynamic programmable masks for optical micro-lithography in the ultraviolet spectral range. The mirror dimensions are 10 μm or larger. By tilting the micromirrors, structural information is transferred to a high resolution photo resist at high frame rates. Further fields of application are semiconductor inspection and measurement technology, and prospectively laser printing, marking and material processing.

Piston micromirror arrays can for example be used for wavefront control in adaptive optical systems. These systems can correct wavefront disturbances in broad spectrum ranges and thereby improve image quality. In comparison to alternative liquid crystal based technologies micromirrors enable significantly higher modulation frequencies. The component capabilities attract special interest in the fields of holography, astronomy and microscopy, as well as in spatial and temporal laser beam and pulse shaping.

Structured illumination for microscopy

Privacy warning

With the click on the play button an external video from www.youtube.com is loaded and started. Your data is possible transferred and stored to third party. Do not start the video if you disagree. Find more about the youtube privacy statement under the following link: https://policies.google.com/privacy

Structured illumination for microscopy developed by Fraunhofer IPMS.

Further information:

Components and Systems

Spatial Light Modulators