The division "Center Nanoelectronic Technologies" (CNT) is the Fraunhofer IPMS research and development platform for material and process optimization for the industrial semiconductor production. Together with Fraunhofer IZM-ASSID and ALD Lab Dresden, a competence center for atomic layer deposition, the CNT developed an ultra-compact capacitor for direct integrated circuit packaging. The capacitor’s design and features can be adapted to specific customer requirements and a large range of capacity values can be achieved with the use of high-k materials and special structuring processes.

Besides the direct integration (“system in package”), the capacitor is also suited for implementation in high-end printed circuit boards. In addition, the technology is also used in interposers or directly on the chip metallization level. The application fields of these capacitors vary and may include signal filtering in low- and high-frequency applications, for decoupling purposes and as energy storage.

Besides working on the integration of materials with a high dielectric constant (high-k materials) in microchips, the CNT also focuses on nanopatterning using electron beam lithography and the development of new chip wiring technologies with maximum reliability, which will also be presented at electronica.

Visitors can find the Fraunhofer IPMS presentation in Hall 4 at Stand 113.