Diffractive MEMS Kit: Tilt Micro-Mirror Array

Fraunhofer IPMS develops customized micro-mirror arrays to be used as spatial light modulators (SLMs) in the deep UV to the near infrared spectral range. The present “DIFFRACTIVE MEMS KIT” has been designed for proof of concept investigations in order to explore new applications as well as to support prototyping in research and development.

The SLM module is based on an array of analogue tilting micro-mirrors. It supports high-resolution optical phase control at high speed. Besides the micro-mirror chip itself, the “DIFFRACTIVE MEMS KIT” comprises the complete address electronics together with a quick-start software and a flexible PC-interface library.

Micro-Mirror Device

The diffractive MEMS device consists of a segmented 256 × 256 array of 16 μm tilt type mirror elements capable of a continuous torsion for the pure phase modulation of the incident light. Each mirror element can be independently addressed and deflected quasi continuously between zero up to the blaze angle at deep UV or higher wavelengths. Any desired deflection pattern can be programmed for the whole array at high speed without iterative cycling.